One-dimensional MEMS scanning mirror (diameter 1.4mm) is manufactured by semiconductor silicon process, ultra-low power consumption electrostatic drive, high-speed spectral vibration mode, can achieve large optical scanning angle and high scanning frequency, the mirror surface is made of gold as the standard coating material, It can provide high reflectivity for infrared wavelength beams. It has been mass-produced and can be delivered to customers in large quantities. It can also use aluminum as a mirror material in large-scale manufacturing to achieve high reflectivity in other wavelength bands. At the same time, other MEMS micro-mirror chips with different sizes of mirrors can be customized according to different needs.